XYZ-Theta Air Bearing Stage

multi-axis solution that uses direct drive linear motor technology and rotary-to-linear technology

Features:
- Non-contact air bearing operation
- Excellent flatness and straightness specifications
- Lowest velocity ripple
- No wearing parts
- Cable carriers to route payload cables
- Granite bridge to support vertical and rotary axis
- Four axis of coordinated motion

Multi-Axis Stage
Product Details (PDF)

XY Horizontal Axis (Brushless Lienar Motor Air Bearing Stage)
Motor P/N
Stroke	10 in	254 mm
Encoder Resolution	1 micron
Force @ 100% Duty	20.6 lbs	91.6 N
Force @ 10% Duty	61.8 lbs	275 N

Vertical Axis (Brushless Linear Motor Air Bearing Stage)
Motor P/N
Stroke	3.5 in	mm
Encoder Resolution	1 micron
Force @ 100% Duty	20.6 lbs	91.6 N
Force @ 10% Duty	61.8 lbs	275 N

Rotary Axis (Brushless Rotary Motor Air Bearing Stage)
Motor P/N	N/A
Stroke	360°
Encoder Resolution	0.001° (3.57 arcsec)
Axial Load Capacity	125 lbs	56.7 kg